Substrate carrier and handle

ABSTRACT

A carrier for holding a plurality of substrates in a generally horizontal, spaced apart, axially aligned relationship includes an enclosure portion defining an interior space, the enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front defined by a door frame, at least one substrate support structure in the enclosure portion for holding the substrates, and a door for sealingly closing the open front. A pair of selectively removable handles is coupled with each of the sides of the enclosure portion. Each handle has an elongate gripping portion presenting a longitudinal axis, and the gripping portion is oriented so that the longitudinal axis is generally horizontal and generally parallel with the sides of the enclosure portion.

RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional PatentApplication No. 60/819,099 entitled SUBSTRATE CARRIER AND HANDLE, filedJul. 7, 2006, hereby fully incorporated herein by reference.

FIELD OF THE INVENTION

The present invention relates generally to carriers for transportingsubstrates and more particularly to handles for substrate carriers.

BACKGROUND OF THE INVENTION

Semiconductor and magnetic components used in electronic devices aretypically manufactured from “substrates,” meaning silicon wafers,magnetic substrates or the like. Sealable enclosures, generally termedtransport modules or substrate carriers, have been used in the industryfor a number of years for storing and transporting substrates betweenprocessing steps and/or between facilities. Semiconductor wafers arestored and transported in such containers because they are notoriouslyvulnerable to damage from contaminants such as particles. Extraordinarymeasures are taken to eliminate contaminants in clean rooms and otherenvironments where semiconductor wafers are stored or processed incircuits.

Substrate carriers for larger substrates, such as 300 mm and largerwafers, typically utilize a front opening door for insertion and removalof substrates and are known as FOUPs (Front Opening Unified Pods) andFOSBs (Front Opening Shipping Box). The FOUP door does not support theload of the substrates. Instead, a container portion which includes aplastic shell and other members for supporting the substrates carriesthe load of the substrates. Examples of FOUPs include U.S. Pat. Nos.6,010,008 and 6,736,268, which are hereby incorporated by reference.

Such substrate carriers also typically utilize a machine interface, suchas a kinematic coupling, on the bottom of the module to repeatedly andprecisely align the carrier with respect to the processing equipment.This enables robotic, automated handling means to engage the door on thefront side of the carrier, open the door, and, with the necessary amountof precision, engage and remove the substrates. It is highly criticalthat the substrates and carriers are positioned at a particular heightand in a particular orientation with reference to the equipment so thatthe substrates will not be damaged during the robotic withdrawal andinsertion of the substrates and carriers.

Front opening substrate carriers often include side handles for manualtransportation such as depicted and described in U.S. Pat. No.6,736,268, previously incorporated by reference. A drawback of suchearlier handle configurations, however, is that the handle occupiesspace between adjacent carriers in a stocker. This presents a challengeto robotic handling of the carriers, particularly when carriers ofdifferent sizes are stored together. The multiplicity of handlesoccupies the space between the side surfaces of the carriers in thestocker, tending to limit the ways in which the robotic equipment canaccess the carriers. This adds cost and complexity to automated handlingof the carriers, and can even lead to damaged substrates. Accordingly,there is still a need in the industry for a substrate carrier havingmanual handles that do not interfere with robotic handling equipmentwhen a plurality of such carriers of varying sizes are stacked with oneanother.

SUMMARY OF THE INVENTION

In an embodiment, the present invention includes a substrate carrierwith improved manual handles. The handles extend generally horizontallyfront to back on the sides of the carrier and are typically positionedonly a short distance from the top surface of the carrier. This handleorientation and location frees up space between adjacent carriersstacked in a stocker and is especially advantageous where carriers ofdifferent sizes are stacked together. This enables the automated roboticequipment used for handling the substrate carriers to more easily accessthe carriers. The increased space also decreases the likelihood that therobotic equipment will bump or otherwise jar a substrate carrier, whichcan cause damage to the substrates contained therein.

An embodiment of the present invention includes a carrier body definingan interior region in which substrates can be stored and that can besealed with a door. Handles extend generally horizontally front-to backon the side surfaces of the carrier, and may be positioned proximate thetop surface of the carrier. Each handle may include a generallycylindrical gripping portion and an attachment structure. The handlesand attachment structure may be integrally molded with a robotic liftingflange located on the top surface of the substrate carrier.

According to an embodiment, a carrier for holding a plurality ofsubstrates in a generally horizontal, spaced apart, axially alignedrelationship includes an enclosure portion defining an interior space,the enclosure portion having a top, a bottom, a pair of opposing sides,a back and an open front defined by a door frame, at least one substratesupport structure in the enclosure portion for holding the substrates,and a door for sealingly closing the open front. A pair of selectivelyremovable handles is coupled with each of the sides of the enclosureportion. Each handle has an elongate gripping portion presenting alongitudinal axis, and the gripping portion is oriented so that thelongitudinal axis is generally horizontal and generally parallel withthe sides of the enclosure portion. The carrier may further include arobotic lifting flange on the top of the carrier, and the roboticlifting flange and the pair of handles may be integrally molded in asingle piece. The handles may be positioned proximate the top of thecarrier. In some embodiments, each of the sides of the carrier present aheight dimension in a direction extending between the top and bottom,and the handles extend downwardly from the top by no more than one-thirdof the height dimension.

In an embodiment, a carrier for holding a plurality of substrates in agenerally horizontal, spaced apart, axially aligned relationshipincludes an enclosure portion defining an interior space, the enclosureportion having a top, a bottom, a pair of opposing sides, a back and anopen front defined by a door frame, at least one substrate supportstructure in the enclosure portion for holding the substrates, and adoor for sealingly closing the open front. A removable handle structureincluding a robotic lifting flange and a pair of handles is coupled withthe enclosure such that the lifting flange projects upwardly from thetop of the enclosure and a separate one of the handles is disposedadjacent each of the sides of the enclosure. Each handle has an elongategripping portion presenting a longitudinal axis, and the grippingportion is oriented so that the longitudinal axis is generallyhorizontal and generally parallel with the sides of the enclosureportion.

Another embodiment includes a removable manual handle structure for asubstrate carrier. The carrier includes an enclosure portion defining aninterior space, the enclosure portion having a top, a bottom, a pair ofopposing sides, a back and an open front defined by a door frame. Theremovable handle structure includes a robotic lifting flange and a pairof handles. The lifting flange projects upwardly from the top of theenclosure and a separate one of the handles disposed adjacent each ofthe sides of the enclosure. Each handle has an elongate gripping portionpresenting a longitudinal axis, and the gripping portion is oriented sothat the longitudinal axis is generally horizontal and generallyparallel with the sides of the enclosure portion. The removable manualhandle structure nay be integrally molded in a single piece. Theremovable manual handle structure may include means for securing theremovable handle structure to the carrier, which may include a pair ofengaging structures. Each of the sides of the carrier may have structurefor receiving a separate one of the engaging structures.

An object and advantage of embodiments of the present invention is easeof maneuverability of substrate carriers. The location of the manualtransportation handles near the top of substrate carriers and thegenerally horizontal orientation increases the clearance between therobotic equipment and the carriers, making it easier for the equipmentto be used to transport the carriers.

Another object and advantage of embodiments of the present invention isa decreased chance of substrate damage. Greater clearance betweensubstrate carriers decreases the exactness with which the roboticequipment must be used to handle the carriers. This creates a smallerpossibility that the equipment will bump a carrier, which could causedamage to the substrates contained therein.

Further objects and advantages of particular embodiments of the presentinvention may become apparent to those skilled in the art upon review ofthe figures and descriptions of the present invention herein.

BRIEF DESCRIPTION OF THE FIGURES

The invention may be more completely understood in consideration of thefollowing detailed description of various embodiments of the inventionin connection with the following drawings, in which:

FIG. 1 is a perspective view of a plurality of substrate carriersaccording to embodiments of the present invention positioned in astocker;

FIG. 2 is a front elevation view of a plurality of substrate carriersaccording to embodiments of the present invention positioned in astocker;

FIG. 3 is a side elevation view of a prior art substrate carrier; FIG.3A is a front elevation view of a plurality of prior art substratecarriers positioned in a stocker;

FIG. 4 is a side elevation view of a carrier according to an embodimentof the invention; and

FIG. 5 is a side elevation view of a carrier according to an alternativeembodiment of the invention.

While the invention is amenable to various modifications and alternativeforms, specifics thereof have been shown by way of example in thedrawings and will be described in detail. It should be understood,however, that the intention is not to limit the invention to theparticular embodiments described. On the contrary, the intention is tocover all modifications, equivalents, and alternatives falling withinthe spirit and scope of the invention as defined by the appended claims.

DETAILED DESCRIPTION

Referring to FIGS. 1 and 2, there is depicted a plurality of substratecarriers 20, 22, according to embodiments of the present inventionpositioned on shelves 24 of a stocker 26, such as may be found in asemiconductor fabrication facility. Substrate carrier 20 is adapted tocontain a greater number of substrates, such as twenty-five, thansubstrate carriers 22, which may contain, for example, six substrates.One of skill in the art will recognize that, in other embodiments,substrate carriers 20, 22, can contain greater or fewer substrates. Eachsubstrate carrier 20, 22, generally includes an enclosure portion 28defining an interior space 30 where substrates can be stored. Generally,the substrates will be supported in one or more substrate supportstructures (not depicted) fastened inside enclosure portion 28. Variousconfigurations of such substrate support structures are depicted anddescribed in U.S. Pat. Nos. 6,267,245 and 6,644,477, hereby fullyincorporated herein by reference.

Enclosure portion 28 generally includes a top wall 32, a bottom wall 34,a pair of opposing side walls 36, 38, a back wall 40, and an open front42 defined by a door frame 44. A door 46 is sealably engagable in doorframe 44 to close open front 42 and thereby to create a microenvironmentfor semiconductor wafers or other substrates as is known in the art.Door 46 typically includes transparent vision panel 48 through whichsubstrates stored in carrier 20, 22, can be observed from the outsidewith door 46 in place. Further, door 46 will typically have one or morelatch mechanisms (not depicted) for securing door 46 in place in doorframe 44. The latch mechanisms are operable from outside carrier 20, 22,with a key (not depicted) inserted through keyholes 50. Carrier 20, 22,may be equipped with a kinematic coupling 52 and a robotic liftingflange 54 to enable automated handling. Other details of substratecarriers are disclosed in U.S. Pat. Nos. 6,216,874; 6,206,196;5,944,194, owned by the owner of this application and hereby fullyincorporated herein by reference.

According to embodiments of the invention, substrate carriers 20, 22,also include a removable handle structure 55 including a pair of handles56, 58, that can be used for manual transportation of substrate carriers20, 22. Each handle 56, 58, generally includes a generally cylindricalgripping portion 60. Handles 56, 58, are coupled with an attachmentstructure 62. As depicted in FIG. 5, gripping portion 60 can havegripping structure 64, such as notches, ribs or the like, to improvegripping purchase and can be given various other cross-sectional shapes,such as ovate, and polygonal. Further, handles 56, 58, may be slightlycurved longitudinally as depicted or may be straight, and may beoriented substantially horizontally or angled toward the front or backas desired.

According to embodiments of the invention, handles 56, 58, are elongateand present a longitudinal major axis X-X. Handles 56, 58, are orientedsuch that axis X-X extends generally parallel with sides 36, 38,respectively, in a front to back orientation relative to carrier 20, 22.Axis X-X generally forms an angle α of between about 0 and about 45degrees relative to the horizontal.

In carriers 20 having a larger substrate capacity, handles 56, 58, arepreferably positioned adjacent sides 36, 38, proximate top wall 32. Asdepicted in FIG. 4, carrier 20 presents a top to bottom height dimensionH. Handles 56, 58, are preferably disposed so that no portion of handles56, 58, extends a distance of more than ⅓ of H below top wall 32, andmore preferably no more than ¼ of dimension H below top wall 32.

Attachment structure 62 as depicted in FIGS. 1, 4, and 5, generallyincludes central body 66, with a pair of wings 68, 70, extendinglaterally to handles 56, 58, respectively. Robotic lifting flange 54extends upwardly from central body 66. Each wing 68, 70, definesaperture 72 having front edge 74. Attachment tabs 76 extend rearwardlyfrom front edge 74. Each of sides 36, 38, has structure 76 on the outersurface thereof defining a forwardly facing pocket 78. Tabs 76 arereceived in pockets 78 to removably attach handles 56, 58, andattachment structure 62 to carrier 20, 22. Similar tab and pocketstructure may be provided on central body 66 and top wall 32 for furthersecurity of attachment.

In use, removable handle structure 55 engaged with carrier 20, 22, bypositioning handle structure 55 over top 32 of carrier 20, 22, with tabs76 registered with pockets 78. Handle structure 55 is then advancedrearwardly until tabs 76 are fully seated in pockets 78. Removalaccomplished by the reverse procedure.

Handle structure 55 may be molded from any suitable polymer material,including without limitation polycarbonate, PEI, or PEEK, and may bemolded in a single, unitary piece, including handles 56, 58, attachmentstructure 62, and optionally lifting flange 54. The polymer material maybe alloyed with other material, such as carbon, to lend desirableproperties, such as electrical conductivity or static dissipation.Alternatively, handle structure 55 may also be molded in a plurality ofseparate pieces and assembled by any suitable methods and materialsknown in the art such as mechanical fasteners or adhesives.

Referring now to FIGS. 2, and 3, 3A, certain advantageous features ofthe carriers 20, 22, of embodiments of the present invention may beobserved and understood. In FIG. 3, there is depicted a prior artsubstrate carrier 80. In contrast with carriers 20, 22, handles 82, 83,extend substantially vertically on side surfaces 84, 86, in a generallytop to bottom orientation. As can be seen in FIG. 3A, when carriers 80are placed on stocker shelves 24, handles 82, 83, of the carriers 80occupy a substantial portion of the space between horizontally adjacentcarriers. This occupies space that could be used by automated handlingequipment in handling the substrate carriers.

In contrast as depicted in FIG. 2, with the horizontally orientedhandles 56, 58, according to embodiments of the present invention,region 120 is left open, free from any intrusion of handles. Because thehandles 56, 58, of carrier 20, 22, are oriented substantiallyhorizontally and in carrier 20 are positioned proximate the top of thecarrier, region 120 may be used by the robotic equipment to access thecarriers 20, 22. As will be understood by those of skill in the art,this feature is particularly advantageous where carriers of differentcapacity are stacked alongside each other in a stocker 26 as depicted inFIG. 2.

The embodiments above are intended to be illustrative and not limiting.Additional embodiments are encompassed within the scope of the claims.Although the present invention has been described with reference toparticular embodiments, those skilled in the art will recognize thatchanges may be made in form and detail without departing from the spiritand scope of the invention. For purposes of interpreting the claims forthe present invention, it is expressly intended that the provisions ofSection 112, sixth paragraph of 35 U.S.C. are not to be invoked unlessthe specific terms “means for” or “step for” are recited in a claim.

1. A carrier for holding a plurality of substrates in a generallyhorizontal, spaced apart, axially aligned relationship, the carriercomprising: an enclosure portion defining an interior space, theenclosure portion having a top, a bottom, a pair of opposing sides, aback and an open front defined by a door frame; at least one substratesupport structure in the enclosure portion for holding the substrates; adoor for sealingly closing the open front; and a pair of selectivelyremovable handles on each of the sides of the enclosure portion, eachhandle having an elongate gripping portion presenting a longitudinalaxis, the gripping portion oriented so that the longitudinal axis isgenerally horizontal and generally parallel with the sides of theenclosure portion.
 2. The carrier of claim 1, wherein the carrierfurther comprises a robotic lifting flange on the top of the carrier. 3.The carrier of claim 2, wherein the robotic lifting flange and the pairof handles are integrally molded in a single piece.
 4. The carrier ofclaim 3, wherein the handles are positioned proximate the top of thecarrier.
 5. The carrier of claim 4, wherein each of the sides of thecarrier present a height dimension in a direction extending between thetop and bottom, and wherein the handles extend downwardly from the topby no more than one-third of the height dimension.
 6. The carrier ofclaim 1, further comprising a kinematic coupling on the bottom of thecarrier.
 7. A carrier for holding a plurality of substrates in agenerally horizontal, spaced apart, axially aligned relationship, thecarrier comprising: an enclosure portion defining an interior space, theenclosure portion having a top, a bottom, a pair of opposing sides, aback and an open front defined by a door frame; at least one substratesupport structure in the enclosure portion for holding the substrates; adoor for sealingly closing the open front; and a removable handlestructure including a robotic lifting flange and a pair of handles, thelifting flange projecting upwardly from the top of the enclosure, aseparate one of the handles disposed adjacent each of the sides of theenclosure, each handle having an elongate gripping portion presenting alongitudinal axis, the gripping portion oriented so that thelongitudinal axis is generally horizontal and generally parallel withthe sides of the enclosure portion.
 8. The carrier of claim 7, whereinthe removable handle structure is integrally molded in a single piece.9. The carrier of claim 8, wherein the handles are positioned proximatethe top of the carrier.
 10. The carrier of claim 9, wherein each of thesides of the carrier present a height dimension in a direction extendingbetween the top and bottom, and wherein the handles extend downwardlyfrom the top by no more than one-third of the height dimension
 11. Thecarrier of claim 7, further comprising a kinematic coupling on thebottom of the carrier.
 12. The carrier of claim 7, wherein the removablehandle structure further comprises a pair of engaging structures, andwherein each of the sides of the carrier has structure for receiving aseparate one of the engaging structures.
 13. A removable manual handlestructure for a substrate carrier, the carrier including an enclosureportion defining an interior space, the enclosure portion having a top,a bottom, a pair of opposing sides, a back and an open front defined bya door frame, the removable handle structure comprising a roboticlifting flange and a pair of handles, the lifting flange projectingupwardly from the top of the enclosure, a separate one of the handlesdisposed adjacent each of the sides of the enclosure, each handle havingan elongate gripping portion presenting a longitudinal axis, thegripping portion oriented so that the longitudinal axis is generallyhorizontal and generally parallel with the sides of the enclosureportion.
 14. The removable manual handle structure of claim 13, whereinthe removable handle structure is integrally molded in a single piece.15. The removable manual handle structure of claim 14, wherein thehandles are positioned proximate the top of the carrier.
 16. Theremovable manual handle structure of claim 15, wherein each of the sidesof the carrier present a height dimension in a direction extendingbetween the top and bottom, and wherein the handles extend downwardlyfrom the top by no more than one-third of the height dimension.
 17. Theremovable manual handle structure of claim 13, further comprising akinematic coupling on the bottom of the carrier.
 18. The removablemanual handle structure of claim 13, further comprising means forsecuring the removable handle structure to the carrier.
 19. Theremovable manual handle structure of claim 18, wherein means forsecuring the removable handle structure to the carrier comprises a pairof engaging structures, and wherein each of the sides of the carrier hasstructure for receiving a separate one of the engaging structures. 20.The removable handle structure of claim 18 in combination with aplurality of carriers, wherein each of the plurality of carriersreceives a different number of substrates, and wherein the removablehandle structure is adapted to be received on each of the plurality ofcarriers.